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特集9 : 研究速報 : Trends in Nanoscale Science and Technology : Characterization of Thin Film Mechanical Properties
http://hdl.handle.net/2261/53230
http://hdl.handle.net/2261/532309431945b-6677-4bc0-b9fa-5bdd5c8febf4
名前 / ファイル | ライセンス | アクション |
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sk049012009.pdf (420.1 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-15 | |||||
タイトル | ||||||
タイトル | 特集9 : 研究速報 : Trends in Nanoscale Science and Technology : Characterization of Thin Film Mechanical Properties | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | ナノスケール科学技術における傾向 : 薄膜の機械的特性の測定 | |||||
著者 |
Hoummady, Moussa
× Hoummady, Moussa× Farnault, Etienne× Fujita, Hiroyuki× Masuzawa, Takahisa |
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著者別名 | ||||||
識別子 | 30539 | |||||
識別子Scheme | WEKO | |||||
姓名 | ウマディ, ムサ | |||||
著者別名 | ||||||
識別子 | 30540 | |||||
識別子Scheme | WEKO | |||||
姓名 | ファルノー, エチエンヌ | |||||
著者別名 | ||||||
識別子 | 30541 | |||||
識別子Scheme | WEKO | |||||
姓名 | 藤田, 博之 | |||||
著者別名 | ||||||
識別子 | 30542 | |||||
識別子Scheme | WEKO | |||||
姓名 | 増沢, 隆久 | |||||
著者所属 | ||||||
著者所属 | Centre National de la Recherche Scientifique (CNRS) 電気工学 | |||||
著者所属 | ||||||
著者所属 | フランス科学研究庁 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 電気工学 | |||||
著者所属 | ||||||
著者所属 | 3rd Department, Institute of Industrial Science, University of Tokyo マイクロメカトロニクス | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 微細加工学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 小特集 マイクロマシン | |||||
書誌情報 |
生産研究 巻 49, 号 12, p. 626-628, 発行日 1997-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 549 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |