WEKO3
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特集7 : 研究速報 : Morphological Changes and Mechanical Properties of Thermally Fabricated Nanometric Oscillators
http://hdl.handle.net/2261/53228
http://hdl.handle.net/2261/5322898aed84f-c97d-462b-8f05-ab5c38514353
名前 / ファイル | ライセンス | アクション |
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sk049012007.pdf (778.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-15 | |||||
タイトル | ||||||
タイトル | 特集7 : 研究速報 : Morphological Changes and Mechanical Properties of Thermally Fabricated Nanometric Oscillators | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | 加熱により作製したナノメートルオーダの振動子の形状変化と機械特性 | |||||
著者 |
Saya, Daisuke
× Saya, Daisuke× Labachelerie, Michel de× Hoummady, Moussa× Kawakatsu, Hideki |
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著者別名 | ||||||
識別子 | 30523 | |||||
識別子Scheme | WEKO | |||||
姓名 | 佐谷, 大輔 | |||||
著者別名 | ||||||
識別子 | 30524 | |||||
識別子Scheme | WEKO | |||||
姓名 | ラバシェルリ, ミッシェル ド | |||||
著者別名 | ||||||
識別子 | 30525 | |||||
識別子Scheme | WEKO | |||||
姓名 | ウマディ, ムサ | |||||
著者別名 | ||||||
識別子 | 30526 | |||||
識別子Scheme | WEKO | |||||
姓名 | 川勝, 英樹 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 精密機械工学 | |||||
著者所属 | ||||||
著者所属 | Centre national de la Recherche Scientifique (CNRS) 光学 | |||||
著者所属 | ||||||
著者所属 | フランス科学研究庁 | |||||
著者所属 | ||||||
著者所属 | Centre national de la Recherche Scientifique (CNRS) 電気工学 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 精密工学 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We are investigating the feasibility of using a three dimensional mechanical oscillator for detecting force and mass. The mechanical oscillator in question consists of a spherical mass supported by a filiform neck. Depending on the fabrication process, the mass can be as small as a few l0 nm to a few 100 nm. In this paper, we focus on the morphological changes observed during its fabrication by means of surface diffusion induced by heating of a sharpened metal tip. Some results on its mechanical properties will also be reported. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 小特集 マイクロマシン | |||||
書誌情報 |
生産研究 巻 49, 号 12, p. 619-622, 発行日 1997-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 535 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |