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Structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer
http://hdl.handle.net/2261/21
http://hdl.handle.net/2261/21761b372e-fe27-4dd7-a86d-5956c9355c1f
名前 / ファイル | ライセンス | アクション |
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2003JAP_hu2.pdf (1.5 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2006-02-06 | |||||
タイトル | ||||||
タイトル | Structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | copper | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Nanostructured materials | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Silica | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Wetting | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Crystal orientation | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Transmission electron microscopy | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Morphological control | |||||
主題Scheme | Other | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Hu, Minghui
× Hu, Minghui× Noda, Suguru× Okubo, Tatsuya× Yamaguchi, Yukio× Komiyama, Hiroshi |
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著者別名 | ||||||
識別子 | 52 | |||||
識別子Scheme | WEKO | |||||
姓名 | 野田, 優 | |||||
著者別名 | ||||||
識別子 | 53 | |||||
識別子Scheme | WEKO | |||||
姓名 | 大久保, 達也 | |||||
著者別名 | ||||||
識別子 | 54 | |||||
識別子Scheme | WEKO | |||||
姓名 | 山口, 由岐夫 | |||||
著者別名 | ||||||
識別子 | 55 | |||||
識別子Scheme | WEKO | |||||
姓名 | 小宮山, 宏 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The structure and morphology of nanosized Cu islands grown by sputter deposition on clean SiO2 substrates and Ti-underlayered SiO2 substrates are investigated using transmission electron microscopy. On SiO2, spherical Cu islands with a random crystalline orientation are formed, whereas on Ti/SiO2, semispherical islands with a preferred <111> crystalline orientation are formed. Moreover, the Cu islands on Ti/SiO2 have smaller sizes, shorter interisland distances, and a higher number density than those on SiO2. These structural and morphological changes at the nanoscale are discussed from the viewpoint of interfacial interactions. Our study suggests that by using an appropriate metal underlayer, it is possible to fabricate nanosized islands with the desired wettability, crystalline orientation, as well as morphology of island ensembles. | |||||
書誌情報 |
Journal of applied physics 巻 94, 号 5, p. 3492-3497, 発行日 2003-09-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
日本十進分類法 | ||||||
主題 | 436.17 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | American Institute of Physics |