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  1. 134 生産技術研究所
  2. 生産研究
  3. 52
  4. 6
  1. 0 資料タイプ別
  2. 30 紀要・部局刊行物
  3. 生産研究
  4. 52
  5. 6

セッション3 : MEMS : From Development of Production

http://hdl.handle.net/2261/55124
b5f1d5a3-5892-4b0a-9d56-090f6f9309c0
名前 / ファイル ライセンス アクション
sk052006006.pdf sk052006006.pdf (631.7 kB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2013-07-11
タイトル
タイトル セッション3 : MEMS : From Development of Production
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
著者 Ducrée, Jens

× Ducrée, Jens

WEKO 28993

Ducrée, Jens

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Sandmaiser, Hermann

× Sandmaiser, Hermann

WEKO 28994

Sandmaiser, Hermann

Search repository
Lang, Walter

× Lang, Walter

WEKO 28995

Lang, Walter

Search repository
著者所属
著者所属 University of Freibulg, Institute for Microsystem Technology (IMTEK)
著者所属
著者所属 Hahn Schickard Gesellschaft, Institute of Micromachining and Information Technology (HSG-IMIT)
著者所属
著者所属 IZFM, University of Stuttgart
内容記述
内容記述タイプ Other
内容記述 第13回生研学術講演会"マイクロマシン : 基盤技術の充実と応用の展開の現状"
書誌情報 生産研究

巻 52, 号 6, p. 282-285, 発行日 2000-06
ISSN
収録物識別子タイプ ISSN
収録物識別子 0037105X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AN00127075
出版者
出版者 東京大学生産技術研究所
出版者別名
Institute of Industrial Science, the University of Tokyo
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