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  1. 134 生産技術研究所
  2. 生産研究
  3. 49
  4. 12
  1. 0 資料タイプ別
  2. 30 紀要・部局刊行物
  3. 生産研究
  4. 49
  5. 12

特集5 : 研究速報 : A Positionner for Local Probing of Three Dimensional Nanometric Features in a Scanning Electron Microscope

http://hdl.handle.net/2261/53226
ae65531d-844d-4fb7-bcdf-26caf8f152db
名前 / ファイル ライセンス アクション
sk049012005.pdf sk049012005.pdf (337.8 kB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2013-02-15
タイトル
タイトル 特集5 : 研究速報 : A Positionner for Local Probing of Three Dimensional Nanometric Features in a Scanning Electron Microscope
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
その他のタイトル
その他のタイトル 走査型電子顕微鏡下でのナノメータオーダの3次元物体へのプロービング機構
著者 Fukuda, Satoshi

× Fukuda, Satoshi

WEKO 30509

Fukuda, Satoshi

Search repository
Saya, Daisuke

× Saya, Daisuke

WEKO 30510

Saya, Daisuke

Search repository
Labachelerie, Michel de

× Labachelerie, Michel de

WEKO 30511

Labachelerie, Michel de

Search repository
Kawakatsu, Hideki

× Kawakatsu, Hideki

WEKO 30512

Kawakatsu, Hideki

Search repository
著者別名
識別子
識別子 30513
識別子Scheme WEKO
姓名
姓名 福田, 智史
著者別名
識別子
識別子 30514
識別子Scheme WEKO
姓名
姓名 佐谷, 大輔
著者別名
識別子
識別子 30515
識別子Scheme WEKO
姓名
姓名 ラバシェルリ, ミッシェル ド
著者別名
識別子
識別子 30516
識別子Scheme WEKO
姓名
姓名 川勝, 英樹
著者所属
著者所属 2nd Department, Institute of Industrial Science, University of Tokyo 精密機械工学
著者所属
著者所属 Centre national de la Recherche Scientifique (CNRS) 光学
著者所属
著者所属 フランス科学研究庁
著者所属
著者所属 2nd Department, Institute of Industrial Science, University of Tokyo 精密工学
内容記述
内容記述タイプ Other
内容記述 小特集 マイクロマシン
書誌情報 生産研究

巻 49, 号 12, p. 615-616, 発行日 1997-12
ISSN
収録物識別子タイプ ISSN
収録物識別子 0037105X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AN00127075
日本十進分類法
主題 549
主題Scheme NDC
出版者
出版者 東京大学生産技術研究所
出版者別名
Institute of Industrial Science, the University of Tokyo
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