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特集6 : 研究速報 : Some Problems Related to Detection of Displacement of an Object by a Tunneling Current
http://hdl.handle.net/2261/53227
http://hdl.handle.net/2261/53227dfb33a69-432e-48dd-9a77-b45ae352f24c
名前 / ファイル | ライセンス | アクション |
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sk049012006.pdf (303.4 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-15 | |||||
タイトル | ||||||
タイトル | 特集6 : 研究速報 : Some Problems Related to Detection of Displacement of an Object by a Tunneling Current | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | トンネル電流を用いた変位検出の問題点 | |||||
著者 |
Kawakatsu, Hideki
× Kawakatsu, Hideki |
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著者別名 | ||||||
識別子 | 30518 | |||||
識別子Scheme | WEKO | |||||
姓名 | 川勝, 英樹 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 精密工学 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Due to its very high sensitivity to tunneling distance, the tunneling current has the potential of being used for detecting small displacements. Moreover, the target with which the displacement is to be measured need only be a few nanometers or less in size, which makes the detection technique a strong candidate for application to displacement measurement of nano to micrometric objects. In this paper, I will report on an experiment carried out to measure the displacement of a conventional scanning force microscopy cantilever, with an aim of applying the technique to vibration excitation and detection of a nanometric oscillator. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 小特集 マイクロマシン | |||||
書誌情報 |
生産研究 巻 49, 号 12, p. 617-618, 発行日 1997-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 549 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |