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  1. 134 生産技術研究所
  2. 生産研究
  3. 41
  4. 6
  1. 0 資料タイプ別
  2. 30 紀要・部局刊行物
  3. 生産研究
  4. 41
  5. 6

研究速報 : A Dual-Tunneling-Unit STM : application as a nm order measuring machine and a positioning table

http://hdl.handle.net/2261/42328
7c08d60a-8693-452d-8173-6fbc2301ea1a
プレビュー
名前 / ファイル ライセンス Actions
sk041006008.pdf sk041006008.pdf (313.6 kB)
item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2011-02-09
タイトル
タイトル 研究速報 : A Dual-Tunneling-Unit STM : application as a nm order measuring machine and a positioning table
言語
言語 eng
キーワード
主題Scheme Other
主題 ja
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
その他のタイトル
その他のタイトル デュアル トンネル ユニット STM : 測長器および位置決めテーブルとしての応用
著者 KAWAKATSU, Hideki

× KAWAKATSU, Hideki

WEKO 36304

KAWAKATSU, Hideki

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HIGUCHI, Tashiro

× HIGUCHI, Tashiro

WEKO 36305

HIGUCHI, Tashiro

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著者別名
姓名
姓名 川勝, 英樹
著者別名
姓名
姓名 樋口, 俊郎
著者所属
Dept. of Mechanical Engineering and Naval Architecture, Institute of Industrial Science, University of Tokyo 精密機械工学
著者所属
Dept. of Mechanical Engineering and Naval Architecture, Institute of Industrial Science, University of Tokyo メカトロニクス
書誌情報 生産研究

巻 41, 号 6, p. 548-551, 発行日 1989-06-01
ISSN
収録物識別子タイプ ISSN
収録物識別子 0037105X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AN00127075
日本十進分類法
主題Scheme NDC
主題 420
出版者
出版者 東京大学生産技術研究所
出版者別名
Institute of Industrial Science, the University of Tokyo
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