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研究速報 : RELATIONSHIP BETWEEN OPTICAL DAMAGE THRESHOLD AND RESIDUAL ABSORPTION IN EXCIMER LASER COMPONENTS
http://hdl.handle.net/2261/40079
http://hdl.handle.net/2261/4007910228518-5eb7-4613-94b5-fcf597137558
名前 / ファイル | ライセンス | アクション |
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sk040009006.pdf (231.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2011-01-14 | |||||
タイトル | ||||||
タイトル | 研究速報 : RELATIONSHIP BETWEEN OPTICAL DAMAGE THRESHOLD AND RESIDUAL ABSORPTION IN EXCIMER LASER COMPONENTS | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | エキシマレーザー用光学素子の光損傷しきい値と残存吸収の関係 | |||||
著者 |
ITOH, Masahide
× ITOH, Masahide× ENDO, Akira× KURODA, Kazuo× WATANABE, Shuntaro× OGURA, Iwao |
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著者別名 | ||||||
識別子 | 36867 | |||||
識別子Scheme | WEKO | |||||
姓名 | 伊藤, 雅英 | |||||
著者別名 | ||||||
識別子 | 36868 | |||||
識別子Scheme | WEKO | |||||
姓名 | 遠藤, 彰 | |||||
著者別名 | ||||||
識別子 | 36869 | |||||
識別子Scheme | WEKO | |||||
姓名 | 黒田, 和男 | |||||
著者別名 | ||||||
識別子 | 36870 | |||||
識別子Scheme | WEKO | |||||
姓名 | 渡部, 俊太郎 | |||||
著者別名 | ||||||
識別子 | 36871 | |||||
識別子Scheme | WEKO | |||||
姓名 | 小倉, 磐夫 | |||||
著者所属 | ||||||
著者所属 | Dept. of Applied Physics and Applied Mechanics, Institute of Industrial Science, University of Tokyo 応用光学 | |||||
著者所属 | ||||||
著者所属 | Institute for Solid State Physics, University of Tokyo | |||||
書誌情報 |
生産研究 巻 40, 号 9, p. 433-436, 発行日 1988-09-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 530 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |