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スパッタ法による結晶薄膜の自己組織的構造形成とその応用
https://doi.org/10.15083/00002769
200c5763-6241-4aac-abb9-90fb983f0298
名前 / ファイル | ライセンス | アクション | |
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2012-03-01 | |||||
タイトル | ||||||
タイトル | スパッタ法による結晶薄膜の自己組織的構造形成とその応用 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_46ec | |||||
タイプ | thesis | |||||
ID登録 | ||||||
ID登録 | 10.15083/00002769 | |||||
ID登録タイプ | JaLC | |||||
著者 |
辻, 佳子
× 辻, 佳子 |
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著者別名 | ||||||
識別子 | ||||||
識別子 | 7324 | |||||
識別子Scheme | WEKO | |||||
姓名 | ||||||
姓名 | Tsuji, Yoshiko | |||||
書誌情報 | 発行日 2006-04-20 | |||||
学位名 | ||||||
学位名 | 博士(工学) | |||||
学位 | ||||||
値 | doctoral | |||||
学位分野 | ||||||
Engineering (工学) | ||||||
学位授与機関 | ||||||
学位授与機関名 | ||||||
学位授与機関名 | University of Tokyo (東京大学) | |||||
研究科・専攻 | ||||||
Department of Chemical System Engineering, Graduate School of Engineering (工学系研究科化学システム工学専攻) | ||||||
学位授与年月日 | ||||||
学位授与年月日 | 2006-04-20 | |||||
学位授与番号 | ||||||
学位授与番号 | 乙第16534号 | |||||
学位記番号 | ||||||
第16534号 |