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研究解説 : 0.1μm薄膜SOI MOSFETのデバイス・プロセス設計と特性評価
http://hdl.handle.net/2261/52992
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| 名前 / ファイル | ライセンス | アクション | |
|---|---|---|---|
sk048010006.pdf (814.4 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2013-01-21 | |||||
| タイトル | ||||||
| タイトル | 研究解説 : 0.1μm薄膜SOI MOSFETのデバイス・プロセス設計と特性評価 | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | departmental bulletin paper | |||||
| その他のタイトル | ||||||
| その他のタイトル | Device and Process Design and Characterization of 0.1μm Thin Film SOI MOSFETs | |||||
| 著者 |
高宮, 真
× 高宮, 真× 更屋, 拓哉× デュエト, トラン× 田中, 剛× 石黒, 仁揮× 平本, 俊郎× 生駒, 俊明 |
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| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31311 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Takamiya, Makoto | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31312 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Saraya, Takuya | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31313 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Ngoc, Duyet Tran | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31314 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Tanaka, Tsuyoshi | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31315 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Ishikuro, Hiroki | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31316 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Hiramoto, Toshiro | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 31317 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Ikoma, Toshiaki | |||||
| 著者所属 | ||||||
| 著者所属 | 東京大学生産技術研究所第3部 電子工学 | |||||
| 著者所属 | ||||||
| 著者所属 | (株)テキサス・インスツルメンツ筑波研究開発センター 電子工学 | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | 0.1μm薄膜SOI MOSFETの設計・試作を行った. チャネルイオン注入(BF2)のエネルギーをSOIと埋め込み酸化膜の界面にピークがくるよう設計することによりパンチスルーストッパの形成とチャネルのドープを1回のイオン注入で実現した. この簡便なプロセスにより均一ドープの場合と比較し短チャネル効果が抑制できることをシミュレーションにより示し, ゲート長0.095μmのSOI MOSFETの動作を確認した. | |||||
| 書誌情報 |
生産研究 巻 48, 号 10, p. 502-506, 発行日 1996-10 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0037105X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00127075 | |||||
| 日本十進分類法 | ||||||
| 主題 | 549 | |||||
| 主題Scheme | NDC | |||||
| 出版者 | ||||||
| 出版者 | 東京大学生産技術研究所 | |||||
| 出版者別名 | ||||||
| Institute of Industrial Science, the University of Tokyo | ||||||
