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  1. 113 工学系研究科・工学部
  2. 34 マテリアル工学専攻
  3. 1133410 学術雑誌論文
  1. 0 資料タイプ別
  2. 10 学術雑誌論文
  3. 014 自然科学

Fabrication of SiO2/4H-SiC (0001) interface with nearly ideal capacitance-voltage characteristics by thermal oxidation

http://hdl.handle.net/2261/56073
9c1047ef-7b84-46d5-b9a1-0205fdb75c32
名前 / ファイル ライセンス アクション
1.4891166.pdf 1.4891166.pdf (469.2 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2015-02-04
タイトル
タイトル Fabrication of SiO2/4H-SiC (0001) interface with nearly ideal capacitance-voltage characteristics by thermal oxidation
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Kikuchi, Richard Heihachiro

× Kikuchi, Richard Heihachiro

WEKO 2338

Kikuchi, Richard Heihachiro

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Kita, Koji

× Kita, Koji

WEKO 2339

Kita, Koji

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著者所属
著者所属 Department of Materials Engineering, The University of Tokyo
著者所属
著者所属 JST-PRESTO, Japan Science and Technology Agency (JST)
内容記述
内容記述タイプ Other
内容記述 UTokyo Research掲載「次世代パワーデバイスの理想性能に近づく絶縁膜材料作製手法を開発」 URI: http://www.u-tokyo.ac.jp/ja/utokyo-research/research-news/advanced-dielectric-film-growth-technique-for-next-generation-power-devices/
内容記述
内容記述タイプ Other
内容記述 UTokyo Research "Advanced dielectric film growth technique for next generation power devices" URI: http://www.u-tokyo.ac.jp/en/utokyo-research/research-news/advanced-dielectric-film-growth-technique-for-next-generation-power-devices/
書誌情報 Applied Physics Letters

巻 105, p. 032106, 発行日 2014-07-25
ISSN
収録物識別子タイプ ISSN
収録物識別子 0003-6951
ISSN
収録物識別子タイプ ISSN
収録物識別子 1077-3118
DOI
関連識別子
識別子タイプ DOI
関連識別子 info:doi/10.1063/1.4891166
権利
権利情報 (c) 2014 AIP Publishing LLC
出版者
出版者 AIP Publishing LLC
関係URI
関連識別子
識別子タイプ URI
関連識別子 http://www.u-tokyo.ac.jp/ja/utokyo-research/research-news/advanced-dielectric-film-growth-technique-for-next-generation-power-devices/
関係URI
関連識別子
識別子タイプ URI
関連識別子 http://www.u-tokyo.ac.jp/en/utokyo-research/research-news/advanced-dielectric-film-growth-technique-for-next-generation-power-devices/
関係URI
関連識別子
識別子タイプ URI
関連識別子 http://scitation.aip.org/content/aip/journal/apl/105/3/10.1063/1.4891166
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